Saturday, November 29, 2014

Diamond wire for silicon wafering



















The use of diamond wire for cutting silicon wafes is much more efficient than traditional cutting method.The following benfits can be achieved when using diamond wire cutting technology and related products.
  1.2 times faster than slurry;
  2.Faster return on  investment;
  3. Increased capacity without increasing capital expenditures;
  4.Lower cost/wafer resulting from reduced TCO;
  5.Less expensive secondary process costs;
  6. Reduced running costs such as electricity and cooling water;
  7.No slurry mixing or supply and recovery systems required;
  8.Improved TTV;
  9.Reduced bow and warp;
  10.Holistic approach to cutting;
  11.Enhanced RA surface finish reduces secondary processes;
  12.Excellent cutting accuracy;
  13.No PEG and SiC hazardous waste management;
  14.Cleaner and faster process.

 Products Specifications:
Diameter(mm)
Core Wire(mm)
Tolerance(±mm)
Break Tension(N)
Spool Wire Tension at Winding(N)
Pitch(mm)
0.12
0.10
0.005
≥30
10±1
0.5-0.6
0.14
0.12
0.005
≥40
10±1
0.5-0.6


Applied Case:
 Machine Manufacturer
Machine Model
NTC
MWM-442DM
Meyer Burger
DS264

Wafering throughput comparison:
Feature
Slurry
Diamond Wire
Feed Rate:
e.g. 0.42 mm/min
e.g. 1.0 mm/min
Cutting time - 156 x 156 mm
6.8 hours
3.6 hours
Cutting time - 125 x 125 mm
5.6 hours
2.6 hours
Capacity - 156 x 156 mm
6500 wafers/day
13800 wafers/day
Capacity - 125 x 125 mm
7800 wafers/day
16100 wafers/day
Heat Induction
40 - 60 °C
<20 °C
*calculation basis: DS 264; loading length = 800mm; wafer thickness = 0.180mm; (core) wire thickness = 0.120mm

 Silicon Wafer Result Cut by DIAT Electroplated Diamond Wire
Cutting  Material
Wafer Thickness
TTV
Warp
Saw Mark
125×125mm Monocrystailline Ingot
180±20μm
≤30μm
≤50μm
≤15μm
156×156mm 
Monocrystalline Ingot
180±20μm
≤30μm
≤50μm
≤15μm
www.chuck-table.com

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