Saturday, November 29, 2014

Diamond wire for silicon wafering



















The use of diamond wire for cutting silicon wafes is much more efficient than traditional cutting method.The following benfits can be achieved when using diamond wire cutting technology and related products.
  1.2 times faster than slurry;
  2.Faster return on  investment;
  3. Increased capacity without increasing capital expenditures;
  4.Lower cost/wafer resulting from reduced TCO;
  5.Less expensive secondary process costs;
  6. Reduced running costs such as electricity and cooling water;
  7.No slurry mixing or supply and recovery systems required;
  8.Improved TTV;
  9.Reduced bow and warp;
  10.Holistic approach to cutting;
  11.Enhanced RA surface finish reduces secondary processes;
  12.Excellent cutting accuracy;
  13.No PEG and SiC hazardous waste management;
  14.Cleaner and faster process.

 Products Specifications:
Diameter(mm)
Core Wire(mm)
Tolerance(±mm)
Break Tension(N)
Spool Wire Tension at Winding(N)
Pitch(mm)
0.12
0.10
0.005
≥30
10±1
0.5-0.6
0.14
0.12
0.005
≥40
10±1
0.5-0.6


Applied Case:
 Machine Manufacturer
Machine Model
NTC
MWM-442DM
Meyer Burger
DS264

Wafering throughput comparison:
Feature
Slurry
Diamond Wire
Feed Rate:
e.g. 0.42 mm/min
e.g. 1.0 mm/min
Cutting time - 156 x 156 mm
6.8 hours
3.6 hours
Cutting time - 125 x 125 mm
5.6 hours
2.6 hours
Capacity - 156 x 156 mm
6500 wafers/day
13800 wafers/day
Capacity - 125 x 125 mm
7800 wafers/day
16100 wafers/day
Heat Induction
40 - 60 °C
<20 °C
*calculation basis: DS 264; loading length = 800mm; wafer thickness = 0.180mm; (core) wire thickness = 0.120mm

 Silicon Wafer Result Cut by DIAT Electroplated Diamond Wire
Cutting  Material
Wafer Thickness
TTV
Warp
Saw Mark
125×125mm Monocrystailline Ingot
180±20μm
≤30μm
≤50μm
≤15μm
156×156mm 
Monocrystalline Ingot
180±20μm
≤30μm
≤50μm
≤15μm
www.chuck-table.com

Diamond wire for silicon filament cutting

Diamond wire for silicon filament cutting




Product benefits:
  1. Fast cut times;
  2. Increased capacity without increasing capital expenditures;
  3. Faster ROI due to reduced initial capital investment;
  4. Excellent cutting accuracy;

Product specification:
Diametermm
Core Wire(mm
Tolerance
±mm
Break Tension
N
Spool Wire Tension at WindingN
Pitch
mm
0.31
0.22
0.02
≥140
15±1
0.5-0.6

 Applied Case:
Machine Manufacturer
Machine Model
DMT
SR200
www.chuck-table.com

Diamond wire for silicon bricking and cropping/slicng


















Diamond wire enables  bricking and cropping output increased.
Diamond wire is suitable to convert existing slurry saws with process support.
1. Reduced cut times
2. Cleaner and easier cooperation
3. Lower cost of ownership than comparable slurry-based systems
4. Increased productivity
5. Remarkable cutting accuracy
6. Stable, repeatable process
7. Potential kerf recycling


Products Specifications: 
Diametermm
Core Wiremm
Tolerance±mm
Break TensionN
Spool Wire Tension at Winding  (N) 
Pitchmm
0.35crinkle
0.25
0.02
≥150
15±1
0.5-0.6
0.35
0.25
0.02
≥160
15±1
0.5-0.6
0.37
0.27
0.02
≥190
15±1
0.5-0.6


Applied Case: 
Machine Manufacturer
Machine Model
HCT
HCT squarer DM
Shanghai Nissin
NWSS-125G
Meyer Burger
BM850

Diamond wire cutting results:
Capacity
Diamond Wire
Cutting time per ingot
2:35 hours
Downtime between cuts:
0:20 hours
Precision
Surface roughness
ra    <     3     μm
Tolerance
± 0.25 mm (³)
Parallelity / flatness
0.25 mm
TTV
0.5 mm
Perpendicularity
90° ± 0.2°
* Brickmaster BM 850

Bricking comparison: Slurry versus Diamond Wire
Feature
Slurry
Diamond Wire
Maximum Feed Rate:
0.8 mm/min
2.0 - 3 mm/min*
Cutting time - 250 mm ingot height
6.4 hours (400 minutes)
2.6 hours (150 minutes)
Capacity - G5 ingot, 156 x 156, 25 bricks/ingot
3.3 cuts/day ; 92 bricks/day
8.3 cuts/day ; 207 bricks/day
Capacity - 125 x 125 mm
7800 wafers/day
16100 wafers/day
Heat Induction
40° - 60° C
< 20° C
*dependent on ingot quality
www.chuck-talbe.com